Operational principle
Applications
Features
technical parameter
Model | WJZ-600 | WJZ-800 | WJZ-1000 | WJZ-1200 | WJZ-1400 | WJZ-1600 | WJZ-1800 |
vacuum chamber dimensions | φ600X800MM | φ800X1000MM | φ1000X1200MM | φ1200X1400MM | φ1400X1600MM | φ1600X1800MM | φ1800X2000MM |
vacuum system | KT300 | KT400 | KT500 | KT630 | A pair of | A pair of | A pair of |
Coating system | Resistance evaporation source + magnetic control rotating cylindrical target (optional) | ||||||
Coating auxiliary system | The low temperature ion plating power supply | ||||||
Inflation system | Mass flowmeter | Mass flowmeter | Mass flowmeter | Mass flowmeter | Mass flowmeter | Mass flowmeter | Mass flowmeter |
Control mode | Manual or automatic | Manual or automatic | Manual or automatic | Manual or automatic | Manual or automatic | Manual or automatic | Manual or automatic |
Pumping rate | 5X10-3Pa<15min | 5X10-3Pa<15min | 5X10-3Pa<15min | 5X10-3Pa<15min | 5X10-3Pa<15min | 5X10-3Pa<15min | 5X10-3Pa<15min |
Ultimate vacuum | 3.0X10-4Pa | 3.0X10-4Pa | 3.0X10-4Pa | 3.0X10-4Pa | 3.0X10-4Pa | 3.0X10-4Pa | 3.0X10-4Pa |
Remarks | Above equipment parameters for your reference only, specific according to customers' special requirement of practical process design |