In order to minimize the effects brought about by the vacuum chamber vacuum coating machine deformation, we will guide screw transmission piece is fixed in the middle of a rigid layer, the between the bottom of the vacuum chamber wall and the point, line, surface active support, to absorb and insulate deformation and set deformation compensation adjusting mechanism, in front of the vacuum pumping system, according to finite element calculations provide theoretical data is preset by the appropriate amount of compensation, to make it in the vacuum state issued to balance. And this vacuum design also makes the vacuum coating machine can make the film in a vacuum environment, to prevent the impact of external factors.
In order to verify the results of finite element calculation, the deformation and compensation of the vacuum chamber were tested. First four micrometer positioning in the workbench installed outside of the vacuum wall of the base, when the vacuum chamber by the air pump to vacuum recorded variation of the dial gauge, after normalization for with laser self adjust collimator deformation compensation. By adjusting the level of autocollimator issued a laser beam through the irradiation of the vacuum chamber glass window is fixed in a mirror, in atmospheric environment down plastic variable compensation adjusting mechanism, the reflected beam into the autocollimator receiver field of view, recorded two dimensional angular deviation. After that, the data need to be analyzed and processed to get the test results.