CJ Series Magnetron Sputtering Vacuum Coating Machine

Date:2016-01-16 13:28:37 Hits:3426

CJ Series Magnetron Sputtering Vacuum Coating Machine

Operational principle

The operating principle of magnetron sputtering of series CJ magnetron sputtering vacuum membrane plate machine: the so-called “sputtering” is using the energetic particle (the gas positive ion is used generally) to bombard the object so as to cause the phenomenon of the surface atom of the objective escaping from the parent. As far back as 1842, Grove had found this phenomenon in the laboratory. The magnetron sputtering target adopts the static electromagnetic field, which is curvilinear, while the plane target and cylindrical target adopt the uniform electric field and logarithm electric field respectively. Under effect of the electric field, the electron will collide with the argon atom in the process of accelerating flying to the substrate. When the electron has enough energy (about 30ev), Ar+ will be ionized and the electron will be produced and fly to the substrate; under effect of the electric field, Ar+ will accelerate flying to the cathode (the sputtering target) and bombard the surface of the target with high energy and make the target sputtering.

Applications

It is widely used in electrical appliances, watch & clock, golf head, arts and crafts, toys, lights reflectors, phone keypad housing and instrumentation, plastics, glass, ceramics, tiles and other surface decorative coating film and functional coating of tool and mould. It has the irreplaceable advantages in areas of coated ultra-black film, gold decoration film and conductive film.

Features

1) Good film thickness controllability and repeatability. The predetermined thickness of film can be reliably coated, and the sputtering coating film can be obtained with uniform thickness film layer on the large surface;
2) Strong adhesion of the film and the substrate. Some of the high energy of the sputtered atoms generates the different degrees of incidence phenomenon, forming a layer of pseudo-diffusion layer that sputtered atoms fused to the substrate atoms each other;
3) Prepare a film made by special material, different materials may be used to sputter and prepare a mixed film and compound film, and also a Tin imitation gold film can be sputtered; 
4) High purity with film layer, the sputtering film layer will not be mixed with components of crucible heater material.
5) It is equipped with a low-temperature auxiliary ion beam source, directly cool coat the film at room temperature without heating, energy saving and productivity improvement.

technical parameter

Model

  CJ-600

  CJ-800

  CJ-1000

  CJ-1200

  CJ-1400

  CJ-1500

CJ-1600

vacuum chamber dimensions

φ600X800MM

φ800X1000MM

φ1000X1200MM

φ1200X1400MM

φ1400X1600MM

φ1500X1500MM

φ1600X1800MM

  vacuum system

KT400
Diffusion pump unit

KT500
Diffusion pump unit

KT800
Diffusion pump unit

KT630
Diffusion pump unit

A pair of
KT630
Diffusion pump unit

A pair of
KT630
Diffusion pump unit

A pair of
KT630
Diffusion pump unit

Coating system

Dc or intermediate frequency power supply, plating auxiliary ion dedicated power supply

Inflation system

Mass flowmeter

Mass flowmeter

Mass flowmeter

Mass flowmeter

Mass flowmeter

Mass flowmeter

Mass flowmeter

Control mode

Manual or automatic

Manual or automatic

Manual or automatic

Manual or automatic

Manual or automatic

Manual or automatic

Manual or automatic

Ultimate vacuum

5X10-4Pa

5X10-4Pa

5X10-4Pa

5X10-4Pa

5X10-4Pa

5X10-4Pa

5X10-4Pa

Remarks

Above equipment parameters for your reference only, specific according to customers' special requirement of practical process design

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