CJ Series Magnetron Sputtering Vacuum Coating Machine
Date:2016-01-16 13:28:37 Hits:3426

The operating principle of magnetron sputtering of series CJ magnetron sputtering vacuum membrane plate machine: the so-called “sputtering” is using the energetic particle (the gas positive ion is used generally) to bombard the object so as to cause the phenomenon of the surface atom of the objective escaping from the parent. As far back as 1842, Grove had found this phenomenon in the laboratory. The magnetron sputtering target adopts the static electromagnetic field, which is curvilinear, while the plane target and cylindrical target adopt the uniform electric field and logarithm electric field respectively. Under effect of the electric field, the electron will collide with the argon atom in the process of accelerating flying to the substrate. When the electron has enough energy (about 30ev), Ar+ will be ionized and the electron will be produced and fly to the substrate; under effect of the electric field, Ar+ will accelerate flying to the cathode (the sputtering target) and bombard the surface of the target with high energy and make the target sputtering.
It is widely used in electrical appliances, watch & clock, golf head, arts and crafts, toys, lights reflectors, phone keypad housing and instrumentation, plastics, glass, ceramics, tiles and other surface decorative coating film and functional coating of tool and mould. It has the irreplaceable advantages in areas of coated ultra-black film, gold decoration film and conductive film.
1) Good film thickness controllability and repeatability. The predetermined thickness of film can be reliably coated, and the sputtering coating film can be obtained with uniform thickness film layer on the large surface;
2) Strong adhesion of the film and the substrate. Some of the high energy of the sputtered atoms generates the different degrees of incidence phenomenon, forming a layer of pseudo-diffusion layer that sputtered atoms fused to the substrate atoms each other;
3) Prepare a film made by special material, different materials may be used to sputter and prepare a mixed film and compound film, and also a Tin imitation gold film can be sputtered;
4) High purity with film layer, the sputtering film layer will not be mixed with components of crucible heater material.
5) It is equipped with a low-temperature auxiliary ion beam source, directly cool coat the film at room temperature without heating, energy saving and productivity improvement.
Model | CJ-600 | CJ-800 | CJ-1000 | CJ-1200 | CJ-1400 | CJ-1500 | CJ-1600 |
vacuum chamber dimensions | φ600X800MM | φ800X1000MM | φ1000X1200MM | φ1200X1400MM | φ1400X1600MM | φ1500X1500MM | φ1600X1800MM |
vacuum system | KT400 Diffusion pump unit | KT500 Diffusion pump unit | KT800 Diffusion pump unit | KT630 Diffusion pump unit | A pair of KT630 Diffusion pump unit | A pair of KT630 Diffusion pump unit | A pair of KT630 Diffusion pump unit |
Coating system | Dc or intermediate frequency power supply, plating auxiliary ion dedicated power supply |
Inflation system | Mass flowmeter | Mass flowmeter | Mass flowmeter | Mass flowmeter | Mass flowmeter | Mass flowmeter | Mass flowmeter |
Control mode | Manual or automatic | Manual or automatic | Manual or automatic | Manual or automatic | Manual or automatic | Manual or automatic | Manual or automatic |
Ultimate vacuum | 5X10-4Pa | 5X10-4Pa | 5X10-4Pa | 5X10-4Pa | 5X10-4Pa | 5X10-4Pa | 5X10-4Pa |
Remarks | Above equipment parameters for your reference only, specific according to customers' special requirement of practical process design |