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Vacuum Evaporation
1. Basic Principles
Vacuum evaporation coating (for short: vacuum evaporation) is a method
for heating the raw materials to form thin films in evaporation containers
in vacuum chambers to vaporize their atoms or molecules from the surface
and form steam flowing into the surface of a solid
(called substrate) to form a solid thin film.
2. In vacuum evaporation, especially the requirements of vacuum environment
are more stricter for some reasons:
A. Prevent reactions from air molecules and evaporation sources at high temperatures;
B.Prevent the molecules of vaporized substances from colliding with air molecules in the coating chamber.
C.From air molecules from mixing into or forming compounds film as impurities
3. Equipment: vacuum coating chamber and vacuum pumping system.
The vacuum coating room is equipped with evaporation source, evaporated material,
substrate support and substrate.