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1. Resistance evaporation source evaporation plating
Heating: the high melting point metal is made into a proper shape of evaporation source,the current passes through it and is directly heated.
Advantages: simple structure, cheap cost, reliable use
Disadvantages: limited maximum temperature and shorter heater life
Applied filed: melting point is not too high, especially for the mass production which is not of a high requirements .
2. Electron beam evaporation source evaporation
The evaporating material is placed in a cold water clamp pot and heated by electron beam
Advantages: higher energy density, faster evaporation of high melting point materials, higher purity of film, high thermal efficiency.
Classification: ring gun, straight gun, e-gun and hollow cathode gun
Applied filed: material of high melting point and high purity